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Two-chamber system
Dosing system
A proximity probe is used when the accuracy
of the dosages depends on small bath fluctuations.
Advantages:
• no oxide build-up
• inexpensive
Charging system
A submerged probe is used in the fusion
chamber for greater fluctuations in the
charging.
Monitoring with a submerged and a proximity probe 1 electronic control system
Low-cost system for simple process cycles
Two-chamber system
Dosing system
A proximity probe is used when the accuracy
of the dosages depends on small bath fluctuations.
Advantages:
• no oxide build-up
• inexpensive
Charging system
A submerged probe is used in the fusion
chamber for greater fluctuations in the
charging.
Monitoring with a submerged and a proximity probe 2 electronic control systems
Flexible measuring possibility for
independent process cycles
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