Two-chamber system
Dosing system
A proximity probe is used when the accuracy of the dosages depends on small bath fluctuations.

Advantages:
• no oxide build-up
• inexpensive

Charging system
A submerged probe is used in the fusion chamber for greater fluctuations in the charging.

Monitoring with a submerged and a proximity probe 1 electronic control system




Low-cost system for simple process cycles



Two-chamber system
Dosing system
A proximity probe is used when the accuracy of the dosages depends on small bath fluctuations.

Advantages:
• no oxide build-up
• inexpensive

Charging system
A submerged probe is used in the fusion chamber for greater fluctuations in the charging.

 

Monitoring with a submerged and a proximity probe 2 electronic control systems

Flexible measuring possibility for independent process cycles